Microelectromechanical systems (MEMS) are miniaturised machines and devices that typically exploit the capabilities of microelectronic fabrication. This course gives an overview of the working principles, fabrication methods and applications encountered with the world of MEMS including:
Scaling of forces at the microscale
The relative importance of surface and body forces at the micro-scale and how this influences methods of sensing and actuation.
Microfluidics
Physical principles behind manipulation of fluids at the micro-scale, and applications such as inkjet printing and point of care diagnostics.
Materials for MEMS devices
An overview of materials typically used in MEMS devices, both as structural materials and for functional elements in sensor and actuator design.
Mechanics in MEMS devices
The static and dynamic mechanical principles behind a number of MEMS devices, and how this is can be measured as an electrical signal.
Fabrication techniques for MEMS and microsystems
An overview of typical micromachining technology used in the fabrication of MEMS devices, together with other emerging technologies used.
Sensors, Actuators and Energy harvester
Understanding of the various materials and methods used as sensors and actuators and their performance.
Understanding the common transduction method used in energy harvesters and their underlying principles.
This course shares lectures and other content with MECHENG 728; completing this course will prevent future enrolments in MECHENG 728.